MBRAUN Evaporation
Systems
For the evaporation of thin films under controlled atmospheres,
MBRAUN offers the right combination
of glovebox and evaporator.
Our system MB-EVAP is an
integrated solution in MBRAUN
gloveboxes, which allows the work under controlled
atmospheres (Nitrogen or Argon) without disturbing
the process chain. The MB-EVAP itself consists of
two main parts…the vacuum chamber, which is
available in two different shapes and the evaporator
itself with a broad range of sources for evaporating
material.
The vacuum chambers are available as cylindrical
shape with integrated lifting mechanism. |
 |
Through a base plate sources + additional thin film equipment
is integrated in the box; the vacuum chamber lifts to
the top and allows a complete work under controlled atmospheres.
For advanced applications, there are vacuum chambers
in rectangular shape available. A front door allows
the work inside the glovebox, a backside door can be
used as "service door" for cleaning the system
or adjustments while the inner door is closed. This
system allows a maximum flexibility and a broad variaty
of customized solutions, e.g. a heat- and coolable substrate
rotation table, DC sputter sources (non reactiv), etc.
Available sources are:
• Thermal resistance sources with 2 kVA (10V /
200 A)
• Organic sources (temperature controlled, 50°C
to 600°C)
• Sputter sources (DC, non reactiv)
• Electron beam source
The MBRAUN MB-EVAP is
a flexible system for all kind of applications in the
field of thin film evaporation, e.g. research of OLED
or OSC (organic solar cell).
Examples:
|
